Latent image formation: Nanoscale topography and calorimetric measurements in chemically amplified resists.

Autor:	Ocola, L. E., Fryer, D., Nealey, P., dePablo, J., Cerrina, F., Kämmer, S.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 6, p3974-3979, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu