Minimized response time of optical emission and mass spectrometric signals for optimized endpoint detection.
| Autor: | Thomas, S., Chen, H. H., Hanish, C. K., Grizzle, J. W., Pang, S. W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 4, p2531-2536, 6p |
| Databáze: | Complementary Index |
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