Parameters of the tip arrays covered by low work function layers.
| Autor: | Evtukh, A. A., Litovchenko, V. G., Marchenko, R. I., Klyui, N. I., Semenovich, V., Nelep, C. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 3, p2130-2134, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|