Proximity correction algorithms and a co-processor based on regularized optimization. I. Description of the algorithm.
| Autor: | Peckerar, M. C., Chang, S., Marrian, C. R. K. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1995, Vol. 13 Issue 6, p2518-2525, 8p |
| Databáze: | Complementary Index |
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