Dimensional metrology with scanning probe microscopes.
| Autor: | Griffith, J. E., Marchman, H. M., Miller, G. L., Hopkins, L. C. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1995, Vol. 13 Issue 3, p1100-1105, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|