Optical probe microscope for nondestructive metrology of large sample surfaces.
| Autor: | Marchman, H. M., Griffith, J. E., Trautman, J. K. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1995, Vol. 13 Issue 3, p1106-1111, 6p |
| Databáze: | Complementary Index |
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