Accelerated radiation damage studies of antireflection materials on SiC x-ray mask membrane.
| Autor: | Shoki, T., Ohkubo, R., Kosuga, H., Yamaguchi, Y., Annaka, N., Wells, G. M., Yamazaki, K., Cerrina, F. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1994, Vol. 12 Issue 6, p3995-4000, 6p |
| Databáze: | Complementary Index |
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