Edge position measurement with a scanning probe microscope.
| Autor: | Griffith, J. E., Marchman, H. M., Hopkins, L. C. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1994, Vol. 12 Issue 6, p3567-3570, 4p |
| Databáze: | Complementary Index |
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