Electron-beam lithography for the fabrication of air-bridged, submicron Schottky collectors.
| Autor: | Muller, R. E., Martin, S. C., Smith, R. P., Allen, S. A., Reddy, M., Bhattacharya, U., Rodwell, M. J. W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1994, Vol. 12 Issue 6, p3668-3672, 5p |
| Databáze: | Complementary Index |
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