Reaction between diamond and titanium for ohmic contact and metallization adhesion layers.
| Autor: | Viljoen, P. E., Lambers, E. S., Holloway, P. H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1994, Vol. 12 Issue 5, p2997-3005, 9p |
| Databáze: | Complementary Index |
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