Profiling of silicide-silicon structures using a combination of the spreading resistance and point contact current-voltage methods.
| Autor: | Heddleson, J. M., Weinzierl, S. R., Hillard, R. J., Rai-Choudhury, P., Mazur, R. G. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1994, Vol. 12 Issue 1, p317-321, 5p |
| Databáze: | Complementary Index |
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