Size-scalable, 2.45-GHz electron cyclotron resonance plasma source using permanent magnets and waveguide coupling.
| Autor: | Getty, Ward D., Geddes, Joseph B. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1994, Vol. 12 Issue 1, p408-415, 8p |
| Databáze: | Complementary Index |
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