Very low damage etching of GaAs.
| Autor: | Murad, S. K., Wilkinson, C. D. W., Wang, P. D., Parkes, W., Sotomayor-Torres, C. M., Cameron, N. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 6, p2237-2243, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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