Limits of low-energy electron optics.
| Autor: | Hordon, Laurence S., Huang, Zhirong, Maluf, Nadim, Browning, Ray, Pease, R. Fabian W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 6, p2299-2303, 5p |
| Databáze: | Complementary Index |
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