Patterning of C60 films.
Autor: | Hamza, A. V., Balooch, M., Tench, R. J., Schildbach, M. A., Hawley-Fedder, R. A., Lee, H. W. H., McConaghy, C. |
---|---|
Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 3, p763-765, 3p |
Databáze: | Complementary Index |
Externí odkaz: |