Triode characteristics and vacuum considerations of evaporated silicon microdevices.
| Autor: | Aslam, M., Klimecky, P., Myers, G. P., Busta, H. H., Zimmerman, B. J., Artz, B. E., Cathey, L. W., Elder, R. E. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 2, p422-425, 4p |
| Databáze: | Complementary Index |
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