Influence of shifter errors on the printability of L/S structures using the alternated phase-shifting design: Simulations and experiments.
| Autor: | Op de Beeck, Maaike, Ronse, Kurt, Kamon, Kazuya, Fujinaga, Masato, Kusunose, Hal, Morimoto, Hiroaki |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1992, Vol. 10 Issue 6, p2468-2479, 12p |
| Databáze: | Complementary Index |
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