Closed-ampoule diffusion of sulfur into Cd-doped InP substrates: Dependence of S profiles on diffusion temperature and time.
| Autor: | Faur, Mircea, Faur, Maria, Honecy, Frank, Goradia, Chandra, Goradia, Manju, Jayne, Douglas, Clark, Ralph |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1992, Vol. 10 Issue 4, p1277-1284, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|