Facetless Bragg reflector surface-emitting AlGaAs/GaAs lasers fabricated by electron-beam lithography and chemically assisted ion-beam etching.
| Autor: | Tiberio, R. C., Porkolab, G. A., Rooks, M. J., Wolf, E. D., Lang, R. J., Larsson, A., Forouhar, S., Cody, J., Wicks, G. W., Erdogan, T., King, O., Hall, D. G. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 6, p2842-2845, 4p |
| Databáze: | Complementary Index |
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