Split-gate electron waveguide fabrication using multilayer poly(methylmethacrylate).
| Autor: | Rooks, M. J., Eugster, C. C., del Alamo, J. A., Snider, G. L., Hu, E. L. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 6, p2856-2860, 5p |
| Databáze: | Complementary Index |
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