Preliminary evaluation of a laser-based proximity x-ray stepper.
| Autor: | Frackoviak, J., Celler, G. K., Freeman, R. R., Jurgensen, C. W., Kola, R. R., Novembre, A. E., Tai, W. W., Thompson, L. F., Trimble, L. E., Tomes, D. N. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 6, p3198-3201, 4p |
| Databáze: | Complementary Index |
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