Surface characterization of multilayer x-ray diffraction specimens.
| Autor: | Burkhalter, P. G., Brown, D. B., Gilfrich, J. V., Konnert, J. H., D'Antonio, P., Rosenstock, H., Shirey, L. M., Thompson, M., Elings, V. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 2, p845-852, 8p |
| Databáze: | Complementary Index |
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