Focused ion beam lithography.
| Autor: | Huh, J. S., Shepard, M. I., Melngailis, J. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1991, Vol. 9 Issue 1, p173-175, 3p |
| Databáze: | Complementary Index |
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