Ionization of sputtered metals in high power pulsed magnetron sputtering.
| Autor: | Bohlmark, Johan, Alami, Jones, Christou, Chris, Ehiasarian, Arutiun P., Helmersson, Ulf |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2005, Vol. 23 Issue 1, p18-22, 5p |
| Databáze: | Complementary Index |
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