Two-photon absorption laser induced fluorescence on O and O3 in a dc plasma for oxidation of aluminum.
| Autor: | Knechten, K., Kniknie, B. J., Engeln, R., Swagten, H. J. M., Koopmans, B., van de Sanden, M. C. M., de Jonge, W. J. M. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2004, Vol. 22 Issue 6, pL11-L14, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|