Real-time acoustic sensing and control of metalorganic chemical vapor deposition precursor concentrations delivered from solid phase sources.
| Autor: | Henn-Lecordier, L., Kidder, J. N., Rubloff, G. W. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2004, Vol. 22 Issue 5, p1984-1991, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|