Fabrication of dry etched and subsequently passivated laser facets in GaAs/AlGaAs.
| Autor: | Deichsel, Eckard, Franz, Gerhard |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2004, Vol. 22 Issue 5, p2201-2205, 5p |
| Databáze: | Complementary Index |
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