Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation process.
| Autor: | Ichimura, Shingo, Nonaka, Hidehiko, Morikawa, Yoshiki, Noyori, Tsuyoshi, Nishiguchi, Tetsuya, Kekura, Mitsuru |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2004, Vol. 22 Issue 4, p1410-1414, 5p |
| Databáze: | Complementary Index |
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