Determination of Ti+-flux and Ar+-flux of ionized physical vapor deposition of titanium from multiscale model calibration with test structures.
| Autor: | Jacobs, W., Kersch, A., Ruf, A., Urbansky, N. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2003, Vol. 21 Issue 4, p922-936, 15p |
| Databáze: | Complementary Index |
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