Comparison of silicon dioxide layers grown from three polymethylsiloxane precursors in a high-density oxygen plasma.
| Autor: | Qi, Y., Xiao, Z. G., Mantei, T. D. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2003, Vol. 21 Issue 4, p1064-1068, 5p |
| Databáze: | Complementary Index |
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