Abnormal room-temperature oxidation of silicon in the presence of copper.
| Autor: | Hinode, Kenji, Takeda, Ken'ichi, Kondo, Seiichi |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 5, p1653-1658, 6p |
| Databáze: | Complementary Index |
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