Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO2.
| Autor: | Gaboriau, Freddy, Peignon, Marie-Claude, Cartry, Gilles, Rolland, Laetitia, Eon, David, Cardinaud, Christophe, Turban, Guy |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 3, p919-927, 9p |
| Databáze: | Complementary Index |
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