Atomic force microscopy investigation of a-C:H films prepared by plasma enhanced chemical vapor deposition for inertial confinement fusion experiments.
| Autor: | Dumay, B., Finot, E., Theobald, M., Legaie, O., Baclet, P., Durand, J., Goudonnet, J. P. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 2, p366-374, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|