Determination of electron temperature, atomic fluorine concentration, and gas temperature in inductively coupled fluorocarbon/rare gas plasmas using optical emission spectroscopy.
| Autor: | Schabel, M. J., Donnelly, V. M., Kornblit, A., Tai, W. W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 2, p555-563, 9p |
| Databáze: | Complementary Index |
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