Electron temperatures of inductively coupled Cl2-Ar plasmas.
| Autor: | Fuller, N. C. M., Donnelly, Vincent M., Herman, Irving P. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 1, p170-173, 4p |
| Databáze: | Complementary Index |
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