Synthesis of BNx-SiNy composite films by multisource plasma chemical vapor deposition.
| Autor: | Nonogaki, Ryozo, Yamada, Suzuya, Ibukiyama, Masahiro, Wada, Tetsuya |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 5, p2039-2042, 4p |
| Databáze: | Complementary Index |
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