Spatial distributions of the absolute CF and CF2 radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation.
| Autor: | Nakamura, Masayuki, Hori, Masaru, Goto, Toshio, Ito, Masafumi, Ishii, Nobuo |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 5, p2134-2141, 8p |
| Databáze: | Complementary Index |
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