The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition.

Autor: Ito, Natsuko, Moriya, Tsuyoshi, Uesugi, Fumihiko, Moriya, Shuji, Aomori, Masaru, Kato, Yoshinori, Tachibana, Mitsuhiro
Zdroj: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 4, p1248-1254, 7p
Databáze: Complementary Index