Effects of ozone assisted deposition on the dielectric properties of 90° off-axis radio frequency magnetron sputtered SrTiO3.
| Autor: | Gibbons, B. J., Fan, Y., Findikoglu, A. T., Jia, Q. X., Reagor, D. W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 1, p56-61, 6p |
| Databáze: | Complementary Index |
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