Calculated energetics for adsorption and desorption steps during etching of Si(110) surface by Cl.
| Autor: | Halicioglu, Timur |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 1, p372-375, 4p |
| Databáze: | Complementary Index |
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