Gas utilization in remote plasma cleaning and stripping applications.
| Autor: | Kastenmeier, B. E. E., Oehrlein, G. S., Langan, John G., Entley, William R. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2000, Vol. 18 Issue 5, p2102-2107, 6p |
| Databáze: | Complementary Index |
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