Laser infrared photothermal radiometry of electronic solids: Principles and applications to industrial semiconductor Si wafers.
| Autor: | Mandelis, Andreas, Riopel, Yan |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2000, Vol. 18 Issue 2, p705-708, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|