Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations.
| Autor: | Drüsedau, Tilo P., Bock, Torsten, John, Thomas-Maik, Klabunde, Frank, Eckstein, Wolfgang |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 5, p2896-2905, 10p |
| Databáze: | Complementary Index |
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