Clean aluminum oxide formation on surface of aluminum cylinder in an ultraclean gas-sampling system.
| Autor: | Ishihara, Yoshio, Itou, Noriko, Kimijima, Tetsuya, Hirano, Takashi |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 5, p3139-3143, 5p |
| Databáze: | Complementary Index |
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