Polysilicon thin film transistors fabricated on low temperature plastic substrates.
Autor: | Carey, Paul G., Smith, Patrick M., Theiss, Steven D., Wickboldt, Paul |
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Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 4, p1946-1949, 4p |
Databáze: | Complementary Index |
Externí odkaz: |