Application of the footing effect in the micromachining of self-aligned, free-standing, complimentary metal-oxide-semiconductor compatible structures.
| Autor: | Ayón, A. A., Ishihara, K., Braff, R. A., Sawin, H. H., Schmidt, M. A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 4, p2274-2279, 6p |
| Databáze: | Complementary Index |
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