Behavior of thin Ta-based films in the Cu/barrier/Si system.
| Autor: | Stavrev, Momtchil, Fischer, Dirk, Praessler, Frank, Wenzel, Christian, Drescher, Kurt |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1999, Vol. 17 Issue 3, p993-1001, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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