Deposition of molybdenum thin films by an alternate supply of MoCl5 and Zn.
| Autor: | Juppo, Marika, Vehkamäki, Marko, Ritala, Mikko, Leskelä, Markku |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 5, p2845-2850, 6p |
| Databáze: | Complementary Index |
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