Noncontact method for measuring coefficient of linear thermal expansion of thin films.
| Autor: | Rafla-Yuan, H., Hichwa, B. P., Allen, T. H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 5, p3119-3122, 4p |
| Databáze: | Complementary Index |
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