Effects of 'processing parameters' in plasma deposition: Acrylic acid revisited.
| Autor: | Candan, Sennur, Beck, Alison J., O'Toole, Liam, Short, Robert D. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 3, p1702-1709, 8p |
| Databáze: | Complementary Index |
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